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纳米级研磨技术及发展动向 论文 PDF
! G& L& |2 v0 w+ u p% @$ X来源《新技术新工艺》杂志
' M. H/ E$ B/ i9 w2 w纳米级研磨技术及发展动向 曹志锡 邓乾发 楼飞燕 袁巨龙 摘 要:概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向.8 G5 p ]0 E% E3 T* C
关键词:纳米级;研磨技术;发展动向
$ V$ }) |: Z+ |分类号:TG749 文献标识码:A
# y2 L8 v- j hTechnology of a Nanometer Level Grinds and Its Development Trend | 7 P6 w3 u+ B+ s# \0 W
基金项目:国家自然科学基金重点项目(50535040)资助" g" L- i7 g' }; V
作者单位:曹志锡(浙江工业大学,310014)
( I0 w6 _8 v7 F p2 ~8 \ 邓乾发(浙江工业大学,310014) 2 R8 \7 ~" x" n" ~/ E& j! ? a# {- b
楼飞燕(浙江工业大学,310014)
- x9 [* m& I# D! e8 z 袁巨龙(浙江工业大学,310014) 8 P- M- _# ]8 g+ V; K' [+ E2 S
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