纳米级研磨技术及发展动向

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纳米级研磨技术及发展动向  论文 PDF
来源《新技术新工艺》杂志
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纳米级研磨技术及发展动向 曹志锡　 邓乾发　 楼飞燕　 袁巨龙　 摘　要：概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向. 关键词：纳米级;研磨技术;发展动向 分类号：TG749 　文献标识码：A 5 f' ?; {. E% \( e; @; ?8 ^1 m# O Technology of a Nanometer Level Grinds and Its Development Trend

基金项目：国家自然科学基金重点项目(50535040)资助 作者单位：曹志锡（浙江工业大学,310014）　   C; ]$ j  F$ {3 W1 o8 p　　　　　邓乾发（浙江工业大学,310014）　 ' A! s" [8 k& i0 C) W4 u% S9 W7 @　　　　　楼飞燕（浙江工业大学,310014）　 % k- e2 x* y1 K5 P8 J6 y# K　　　　　袁巨龙（浙江工业大学,310014）　 & ~9 ^4 `2 D9 b7 c6 x, J- m参考文献： 1 ^8 N# Z4 X4 d" K[1]袁巨龙.功能陶瓷的超精密加工技术[M].哈尔滨:哈尔滨工业大学出版社,2000. [2]安永暢男.超精密加工における化学現象とその利用[J].精密工学会誌,1993,59,(4):7-10. [3]K.Horio,T.Kasai,Y.Ogata.A study on damaged layer remaining in diamond mirror cut surfaces[J],Annal of the CIRP,1992,41(1):137. [4]袁哲俊,王先逵,袁巨龙,等著.精密和超精密加工技术[M].北京:机械工业出版社,1999. [5]華偉民,河西敏雄,崛尾健一郎,薦田みよ子.金属材料のラツピングによおける加工液の效果[J].1991年度精密工学会春季学術演講會演講論文集,1991:419. [6]高瀬省得,河西敏雄.金属材料のラツピングおよび砥石研磨特性[J].1992年度精密工学会春季学術演講會演講論文集,1992:239. % x% G! h6 m/ G9 f' Z[7]杨建东,田春林,等.高速研磨技术[M].北京:国防工业出版社,2003. ( `" o# u, @4 ^% F4 v4 N! B0 z+ T# R[8]Mori Y.,Ikawa N.,Okuda T.,Yamagata K.Numerically controlled elastic emission machining[J].Technology Reports of the Osaka University,26:283-94. * B) s, X" k* e+ ^% {[9]Mori Yuzo.,Ikawa Naoya.,Okuda Toru.,Sugiyama Kazuhisa.,Yamauchi Kazuto.Numerically controlled elastic emission machining-motion,Analysis of fluid and distribution of film thickness[J].Japanese Journal of the Society for Mechanical Engineers,1983,49(11):1-26. [10]Mori Y.,Yamauchi K.,Endo K.Elastic emission machining as evaluated by atomistic techniques[J].Proc.of the 6th International Conference on Production Engineering,1987:58-63. & Y- r4 X; n; a9 p2 [5 F[11]Mori Y.,Yamauchi K.,Endo K.Mechanism of atomic removal in elastic emission machining[J].Precision Engineering,1988,10 (1):24-28. [12]Mori Y.,Yamauchi K.,Endo T,Toyota H.Evaluation of elastic emission machined surfaces by scanning tunneling microscopy[J].Vac.Sci.Technol.A,1990,8(1):621-624. ' w% S' u; B/ M- r8 b1 ~- r[13]Kordonski W.Magneto-rheological finishing[J] Optical Fabrication and Testing Workshop,1992. [14]Evans.C.J,et al.Material removal mechanisms in lapping and polishing[J].Annals of the CIRP,2003,152:611-633.   d! e7 Y! c" i' M5 W; u( F[15]Kim.D.J,et al.A study on the development of in-process dressing lapping wheel and its evaluation of machining characteristics[J].Int J Adv Manuf Technol,2005,26:211-218. " A& t; j# F' j; n" ^! H[16]袁巨龙,吕冰海,等.功能陶瓷超精密加工技术的现状与发展[J].世界制造技术与装备市场,2003(4):17-21. [17]赵萍,吕冰海,袁巨龙,等.智能型纳米级抛光机的运动分析[J].制造技术与机床,2003(7):19-22. [18]赵文宏,黄文君,袁巨龙,等.修正环型纳米级超精密抛光机智能控制系统的实现[J].机电工程,20(3):38-41. [19]赵文宏,袁巨龙,等.智能型纳米级抛光机的控制系统[J].制造技术与机床,2003(8):18-20. 1 q+ @: W: f# R8 ?4 U  l: I[20]Yuan JL,Lou FY,et al.Research on ultra-precision process of STAVAX ESR[J].Advances in Materials Manufacturing Siience and Technologe,2004:63-66,471-472. [21]Yuan JL,Lou FY,et al.Research on ultra-precision machining technology for KTP[J].Advances in Materials Manufacturing Siience and Technologe,2004:471-472,473-476. # s3 {7 Q4 J4 X" ][22]Yuan JL,Zhao P,et al.Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal[J].Joural of Materials Processing Technologh,2003,138:116-119. ' i5 c1 w7 W5 o# I2 o/ x* d[23]LV X,Yuan JL,et al.Study on ultra-precise machining of CLBO crystal[J].Key Engineering Materials,2006,304-305:398-402. ; K0 |" K, c. l9 W& O- J4 o6 o  C[24]Yuan JL,Lin B,et al.New ultra-precision polishing techniques of glass BK-7 optical plate[J].Key Engineering Materials.Advances in Abrasive Processes,2001,202-203:235-238. 6 L5 a% I, K/ h+ w, K9 [

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