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纳米级研磨技术及发展动向 论文 PDF$ ?. X9 r$ ^ _3 P; U
来源《新技术新工艺》杂志% v) b, n4 P5 J
纳米级研磨技术及发展动向 曹志锡 邓乾发 楼飞燕 袁巨龙 摘 要：概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向.
: Y9 @% ~" E3 n4 u关键词：纳米级;研磨技术;发展动向$ v$ E) f$ z( ?# u& a6 Q3 H- [
分类号：TG749 文献标识码：A
7 E! B, c) \4 L4 c: zTechnology of a Nanometer Level Grinds and Its Development Trend |
0 y% [! _/ y- {9 o5 ~6 h基金项目：国家自然科学基金重点项目(50535040)资助4 t& p0 X: t0 v) T4 I5 y4 ^
作者单位：曹志锡（浙江工业大学,310014） ' q5 {" I( k7 f! p4 g+ z( H
邓乾发（浙江工业大学,310014） ! d% m2 K5 n- p2 X" A
楼飞燕（浙江工业大学,310014）
8 |% c, }. _2 ?' G- `1 D5 X, F 袁巨龙（浙江工业大学,310014） # M: A2 E$ r* B
参考文献：1 V+ e2 t1 _+ K5 C; V6 q! A; `0 X
[1]袁巨龙.功能陶瓷的超精密加工技术[M].哈尔滨:哈尔滨工业大学出版社,2000.
# O+ ? P% ~; L2 f" t[2]安永暢男.超精密加工における化学現象とその利用[J].精密工学会誌,1993,59,(4):7-10.9 j2 n0 r/ a- Z* h' |; r
[3]K.Horio,T.Kasai,Y.Ogata.A study on damaged layer remaining in diamond mirror cut surfaces[J],Annal of the CIRP,1992,41(1):137.
' e* y' k% l# r3 U5 J9 v0 P[4]袁哲俊,王先逵,袁巨龙,等著.精密和超精密加工技术[M].北京:机械工业出版社,1999.- O& `. {5 z, i
[5]華偉民,河西敏雄,崛尾健一郎,薦田みよ子.金属材料のラツピングによおける加工液の效果[J].1991年度精密工学会春季学術演講會演講論文集,1991:419.
5 @# H9 F$ A! I! _9 H- z9 _) {[6]高瀬省得,河西敏雄.金属材料のラツピングおよび砥石研磨特性[J].1992年度精密工学会春季学術演講會演講論文集,1992:239.
/ U+ `; z4 x) l5 R$ f[7]杨建东,田春林,等.高速研磨技术[M].北京:国防工业出版社,2003.$ H7 s. C1 K9 Z! J& J* N
[8]Mori Y.,Ikawa N.,Okuda T.,Yamagata K.Numerically controlled elastic emission machining[J].Technology Reports of the Osaka University,26:283-94.0 I" I; |4 P9 I6 w
[9]Mori Yuzo.,Ikawa Naoya.,Okuda Toru.,Sugiyama Kazuhisa.,Yamauchi Kazuto.Numerically controlled elastic emission machining-motion,Analysis of fluid and distribution of film thickness[J].Japanese Journal of the Society for Mechanical Engineers,1983,49(11):1-26.
# N0 r% }5 F/ G+ ? }[10]Mori Y.,Yamauchi K.,Endo K.Elastic emission machining as evaluated by atomistic techniques[J].Proc.of the 6th International Conference on Production Engineering,1987:58-63.
8 q0 U6 U" B; \. N! W[11]Mori Y.,Yamauchi K.,Endo K.Mechanism of atomic removal in elastic emission machining[J].Precision Engineering,1988,10 (1):24-28.
8 ~0 P6 v1 q1 J* k2 o; q[12]Mori Y.,Yamauchi K.,Endo T,Toyota H.Evaluation of elastic emission machined surfaces by scanning tunneling microscopy[J].Vac.Sci.Technol.A,1990,8(1):621-624.
" {/ Q, m8 B$ m$ x[13]Kordonski W.Magneto-rheological finishing[J] Optical Fabrication and Testing Workshop,1992.
8 R# _3 ?1 _9 ~ b+ i1 K; G[14]Evans.C.J,et al.Material removal mechanisms in lapping and polishing[J].Annals of the CIRP,2003,152:611-633.
3 I5 s7 ?$ a$ q7 h[15]Kim.D.J,et al.A study on the development of in-process dressing lapping wheel and its evaluation of machining characteristics[J].Int J Adv Manuf Technol,2005,26:211-218./ p& i" O* x; {
[16]袁巨龙,吕冰海,等.功能陶瓷超精密加工技术的现状与发展[J].世界制造技术与装备市场,2003(4):17-21." n5 j2 Z. x, \% Z* B
[17]赵萍,吕冰海,袁巨龙,等.智能型纳米级抛光机的运动分析[J].制造技术与机床,2003(7):19-22.9 i2 d1 z: }/ ~" C! ]- H
[18]赵文宏,黄文君,袁巨龙,等.修正环型纳米级超精密抛光机智能控制系统的实现[J].机电工程,20(3):38-41.& T4 Z! I1 k) Z. ?& Z5 P! T8 }6 Q
[19]赵文宏,袁巨龙,等.智能型纳米级抛光机的控制系统[J].制造技术与机床,2003(8):18-20.
5 r m M5 O g. g" U[20]Yuan JL,Lou FY,et al.Research on ultra-precision process of STAVAX ESR[J].Advances in Materials Manufacturing Siience and Technologe,2004:63-66,471-472./ Z. `! A1 l% j1 A( E' X
[21]Yuan JL,Lou FY,et al.Research on ultra-precision machining technology for KTP[J].Advances in Materials Manufacturing Siience and Technologe,2004:471-472,473-476.- e- ^* K. l5 {6 v# o ?' o
[22]Yuan JL,Zhao P,et al.Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal[J].Joural of Materials Processing Technologh,2003,138:116-119.2 P; [) `/ s' ]5 y
[23]LV X,Yuan JL,et al.Study on ultra-precise machining of CLBO crystal[J].Key Engineering Materials,2006,304-305:398-402.
( d3 b0 G2 l+ g4 ^7 `) ]9 i8 \[24]Yuan JL,Lin B,et al.New ultra-precision polishing techniques of glass BK-7 optical plate[J].Key Engineering Materials.Advances in Abrasive Processes,2001,202-203:235-238.
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发表于 2007-3-25 15:06:20
